Design and Experiment of a 3DOF Parallel Micro-Mechanism Utilizing Flexure Hinges

Fl substitute for positioning m flexure hinge paper, a p mechanism is hinge modeli that includes analytic stiffn presented. Fir considered. T not coinciden axial elongat mechanism f problem, a 2 additional mo part. On the ensured. The through both emphasizes t significant to micro-mechan Micro positi technology i Microscopy ( micro machin studies on t mechanisms (Moriyama, e Ryu, et al. [4] modeled the Freedom) for hinge. Howe motion even considered an [6]. Howeve modeling pro mechanisms e This led to th Therefore, th flexure hinges Mobility is Byung-Ju Yi , Heung-Youl Na , Goo Bong Chung, Whee Kuk Kim, Il Hong Suh School of Electrical Engineering and Computer Science, Hanyang Univ. Korea Micro-Inspection co. Ansan, Kyungki-do 425-791, Korea Department of Control and Instrumentation Eng., Korea Univ. Korea [email protected] exure hinge has been commonly used as a mechanical joints in the design of microechanisms. However, inaccurate modeling of s deteriorates the positioning accuracy. In this lanar 3DOF parallel-type micro-positioning designed with the intention of accurate flexure ng. For this, a preliminary kinematic analysis inverse kinematics, internal kinematics, and ess modeling referenced to the task coordinate is st, the revolute type of 1DOF flexure hinge is he simulation result based on FEM, however, is t to the analytic result. This is due to the minor ion along the link direction that keeps the rom precise positioning. To cope with this DOF flexure hinge model that includes this tion degree as a prismatic joint is employed in basis of this model, the positional accuracy is effectiveness of this accurate model is shown simulation and experimentation This work hat the precise modeling of a flexure hinge is guarantee the positional accuracy of parallel isms using flexure hinge.